| Before ion implantation | after ion implantation (5 × 1013 atoms/cm2) | after ion implantation (1 × 1014 atoms/cm2) | Roughness changes after implantation and dose increasing |
Rms rough (Å) | 2.54 | 0.84 | 0.68 | Roughness increasing |
Ave rough (Å) | 1.14 | 0.55 | 0.49 | Roughness increasing |