Before ion implantation

after ion implantation (5 × 10¹³ atoms/cm²)

after ion implantation (1 × 10¹⁴ atoms/cm²)

Roughness changes after implantation and dose increasing

Rms rough (Å)

2.54

0.84

0.68

Roughness increasing

Ave rough (Å)

1.14

0.55

0.49

Roughness increasing