Set

Process

Deposit

Plate (µm)

Time (h)

T (˚C)

Final state

Alloy

Thickness (µm)

LH-108

Sputtering

Al

0.150

330

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LHC-110

Sputtering

Al

0.300

330

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TL-01

TLPB

Al-Si

313

440

2

590

Bonded

TL-02

TLPB

Al-Si

289

440

2

600

Bonded

TL-03

TLPB

Al-Si

321

433

6

590

Partially bonded

TL-04

TLPB

Al-Si

316

433

6

590

Not bonded

TL-05

TLPB

Al-Si

314

478

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570

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TL-06

TLPB

Al-Si

312

478

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570

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