R = NH₃/SiH₄

Si_dep/Si_an

N_dep/N_an

H_dep/H_an

x_dep/x_an

n (633 nm)/E_g (eV)

Total atomic N (at/cm³)

08/16

0.58/0.73

0.2/0.26

0.22/0.01

0.34/0.36

2.79/1.7

5.98 × 10²²

19/16

0.41/0.51

0.37/0.41

0.22/0.07

0.93/0.8

2.32/2.38

7.82 × 10²²

32/16

0.40/0.54

0.44/0.37

0.15/0.09

1.1/0.68

2.01/2.75

9.42 × 10²²

80/16

0.34/0.4

0.46/0.48

0.15/0.12

1.35/1.2

1.95/3.8

1.31 × 10²³