R = NH3/SiH4 | Sidep/Sian | Ndep/Nan | Hdep/Han | xdep/xan | n (633 nm)/Eg (eV) | Total atomic N (at/cm3) |
08/16 | 0.58/0.73 | 0.2/0.26 | 0.22/0.01 | 0.34/0.36 | 2.79/1.7 | 5.98 × 1022 |
19/16 | 0.41/0.51 | 0.37/0.41 | 0.22/0.07 | 0.93/0.8 | 2.32/2.38 | 7.82 × 1022 |
32/16 | 0.40/0.54 | 0.44/0.37 | 0.15/0.09 | 1.1/0.68 | 2.01/2.75 | 9.42 × 1022 |
80/16 | 0.34/0.4 | 0.46/0.48 | 0.15/0.12 | 1.35/1.2 | 1.95/3.8 | 1.31 × 1023 |