Сd concentration in the coating, аt.% | β-Ta, tetragonal lattice, nm | α-Ta, cubic lattice, nm | Cd, hexagonal lattice, nm | ||
а | с | а | а | с | |
6.7 | 1.0095 ± 0.0018 | 0.5333 ± 0.0018 | - | - | - |
9.9 | 1.0213 ± 0.0010 | 0.5307 ± 0.0010 | - | - | - |
13.9 | 1.0214 ± 0.0011 | 0.5310 ± 0.0011 | - | - | - |
17.0 | 1.0207 ± 0.0007 | 0.5306 ± 0.0007 | - | - | - |
17.3 | 1.0204 ± 0.0005 | 0.5307 ± 0.0005 | - | - | - |
22.9 | 1.0224 ± 0.0011 | 0.5301 ± 0.0011 | - | - | - |
25.3 | 1.0199 ± 0.0012 | 0.5335 ± 0.0012 | - | - | - |
30.4 | 1.0145 ± 0.0007 | 0.5319 ± 0.0007 | - | - | - |
38.0 | 1.0215 ± 0.0009 | 0.5300 ± 0.0009 | - | - | - |
44.0 | 1.0153 ± 0.0002 | 0.5343 ± 0.0002 | - | - | - |
48.8 | - | 0.5334 | 0.3343 ± 0.0001 | - | - |
56.6 | 1.0740 | 0.5338 | 0.3340 ± 0.0038 | - | - |
61.3 | - | - | 0.3361 ± 0.0002 | - | - |
66.2 | - | - | 0.3351 ± 0.0001 | - | - |
74.4 | - | - | - | 0.29769 | 0.56154 |
75.4 | - | - | - | 0.29772 | 0.56136 |
87.6 | - | - | - | 0.29785 | 0.56114 |