Сd concentration in the coating, аt.%

β-Ta, tetragonal lattice, nm

α-Ta, cubic lattice, nm

Cd, hexagonal lattice, nm

а

с

а

а

с

6.7

1.0095 ± 0.0018

0.5333 ± 0.0018

-

-

-

9.9

1.0213 ± 0.0010

0.5307 ± 0.0010

-

-

-

13.9

1.0214 ± 0.0011

0.5310 ± 0.0011

-

-

-

17.0

1.0207 ± 0.0007

0.5306 ± 0.0007

-

-

-

17.3

1.0204 ± 0.0005

0.5307 ± 0.0005

-

-

-

22.9

1.0224 ± 0.0011

0.5301 ± 0.0011

-

-

-

25.3

1.0199 ± 0.0012

0.5335 ± 0.0012

-

-

-

30.4

1.0145 ± 0.0007

0.5319 ± 0.0007

-

-

-

38.0

1.0215 ± 0.0009

0.5300 ± 0.0009

-

-

-

44.0

1.0153 ± 0.0002

0.5343 ± 0.0002

-

-

-

48.8

-

0.5334

0.3343 ± 0.0001

-

-

56.6

1.0740

0.5338

0.3340 ± 0.0038

-

-

61.3

-

-

0.3361 ± 0.0002

-

-

66.2

-

-

0.3351 ± 0.0001

-

-

74.4

-

-

-

0.29769

0.56154

75.4

-

-

-

0.29772

0.56136

87.6

-

-

-

0.29785

0.56114