Target position (mm) | Average (μm) | Standard deviation (μm) |
−1 | 0.880 | 0.062 |
−0.5 | 0.625 | 0.043 |
0 | 0.655 | 0.059 |
0.3 | 0.485 | 0.035 |
0.5 | 0.640 | 0.049 |
0.7 | 0.800 | 0.032 |
1 | 0.850 | 0.045 |