Sample

S1

S2

S3

S4

S5

S6

S7

S8

S9

S10

S11

σ

AlN

11.8

15.3

13.7

13.7

1.40

23.6

12.6

12.7

16.0

19.7

9.8

13.3

5.4

Al_M

15.6

7.7

17.6

5.4

17.4

7.4

11.9

7.4

8.7

1.2

29.6

11.8

7.5