*Distance to the top

[mm]

Reference parameters

Changed parameters

Flow rate [sccm]

Number of holes

Hole Diameter

[mm]

**Chamber volume

10

Flow rate [sccm] → 145

Number of holes → 30

Hole diameter [mm] → 18

300

-

-

-

-

54

-

-

-

-

30

-

-

-

-

2/3

30

50

80

100