Mechanical properties |
|
| Roughness Ra (nm) | ||||||
2 | 3 | 8 | 12 | 20 | 30 | 42 | |||
H | 2.15 | 2.17 | 2.32 | 2.24 | 2.38 | 2.33 | 2.9 | ||
Er | 212.3 | 214.2 | 225.4 | 222.1 | 233.5 | 233.5 | 222.3 | ||