No. | Raw materials | Heat treatment conditions | |||
Yttrium | Silicon | Temp. | Duration | Atmosphere | |
(purity) | [O] | (˚C) | hr | ||
1 | powder (99.9%) | 8.3 mm (1.17%) | 1100 | 5 | Quartz tube |
2 | powder (99.9%) | 8.3 mm (1.17%) | 1090 | 5 | Vacuum |
3 | powder (99.9%) | 8.3 mm (1.17%) | 1500 | 1 | Vacuum |
4 | ingot (99.9%) | −100 Me’ (0.081%) | 1600 | 0.5 | 0.1 MPa Ar |
5 | ingot (99.9%) | −100 Me’ (0.081%) | 1600 1100 | 0.5 12 | 0.1 MPa Ar |