Coating

Process

Structure

Interlayer

Thickness (μm)

Roughness Ra (μm)

DLC-1

PVD

a-C:H

CrN

1.2

0.017

DLC-2

PVD

a-C:H:W

CrN

2.9

0.013

DLC-3

PVD

a-C:H

-

1.3

0.015

DLC-4

Plasma CVD + PVD

a-C:H:Si

-

0.9

0.016

DLC-5

Plasma CVD

a-C:H

-

3.0

0.016

DLC-6

Plasma CVD

a-C:H

-

9.9

0.014

DLC-7

Plasma CVD

a-C:H

-

15.0

0.015

DLC-8

Cathode arcion plating

ta-C

-

1.2

0.015