| Sample N˚ | Ti thickness (nm) | a-C:H film thickness (nm) | H (GPa) | Er (GPa) |
| 0 | 0 | 0 | 9 ± 1 | 177 ± 9 |
| 1 | 5 | 350 | 14 ± 1 | 133 ± 12 |
| 2 | 35 | 350 | 16 ± 2 | 142 ± 10 |
| 3 | 35 | 700 | 16 ± 2 | 148 ± 18 |
| 4 | 70 | 350 | 16 ± 1 | 136 ± 12 |
| 5 | 70 | 700 | 15 ± 3 | 128 ± 20 |