| Sample | Total time of GaAs deposition (min) | Total time of In deposition (min) | Statistical quantities | Grain statistics | |||
| Maximum Height (µm) | RMS roughness (µm) | Grain Population Density (µm−2) | Mean Grain Size (µm) | Total Grain Volume (µm3) | |||
| M1 | 60 | 20 | 1.79 | 0.24 | 11.2 | 1.18 | 48 |
| M2 | 60 | 30 | 3.78 | 0.51 | 1.71 | 0.63 | 137 |
| M3 | 60 | 40 | 5.44 | 1.01 | 0.73 | 0.82 | 227 |