| Accuracy | Options | ||
| Regular | Precision | High Precision | |
| Linear (ppm) | 0.5 | 0.2 | 0.2 |
| Linear Range (m) | 25 | 25 | - |
| Straightness (μm) | ±(1.0 + 0.2/m) | ±(0.5 + 0.1/m) | ±(0.2 + 0.05/m) |
| Max. range (μm) | ± 500 | ±300 | ±100 |
| Pitch and Yaw (arcsec) | ±(1.0 + 0.1/m) | ±(0.5 + 0.5/m) | ±(0.2 + 0.05/m) |
| Max. Range (arcsec) | ±800 | ±400 | ±50 |
| Roll (arcsec) | ±1.0 | ±0.5 | ±0.5 |
| Squareness (arcsec) | ±1 | ±0.5 | ±0.5 |
| Temperature (˚C) | 0.2 | 0.1 | 0.1 |
| Humidity (%) | 5 | 3 | 3 |
| Pressure (mmHg) | 1 | 0.3 | 0.3 |