Parameter

Values

n well depth

1.0 μm

peak doping concentration in p⁺ & n⁺ junctions

1.2 × 10²⁰ cm⁻³

p⁺ & n⁺ junction depth/length

0.1 μm/0.8 μm

n⁺ cathode-p⁺ anode contact spacing

2.4 μm

n⁺ cathode-p⁺ anode junction spacing

1.8 μm

p⁺ sub-n well spacing

1.9 μm