Composition

of Ge (%)

No.

boron

Average diffusion ratio (%)

Average

diffusion

length (nm)

Phase

I

Phase

II

Total

Phase

III

Phase

IV

Phase

I to II

15

55

(16 + 39)

0.82 (0.45)

0.28 (0.16)

0.54 (0.29)

−0.08 (−0.04)

1.11

26

0.78 (0.43)

0.21 (0.11)

0.57 (0.31)

0. (0.)

1.09

30

0.72 (0.40)

0.20 (0.11)

0.52 (0.29)

0. (0.)

1.13

15

30

0.74 (0.41)

0.24 (0.13)

0.50 (0.28)

0.05 (0.02)

1.10