Edge terminal technology

Breakdown voltage (V)/%

Device parameter

Deely Etched Meas

1205 (92%)

T = 7 μm

Beveled Meas

1160 (89%)

θ = 80˚, N_a = 1 × 10¹⁹ cm⁻³

Step Meas

425 (32%)

W = 0.5 μm, D = 1.0 μm, n = 5