Pipe section

[mm × mm]

Flow rate

[sccm]

Number of holes

Hole diameter

[mm]

Pipe length

[mm]

10 × 10

100, 200, 300, 400, 500 and 600

14

2

1000

7

2

1000

30 × 30

100, 200, 300, 400, 500 and 600

14

2

1000

7

2

1000