Sample No.

dSi [nm] (estimated)

[nm] (estimated)

Si-layer-thickness ratio: dSi/(dSi +)

1

0.6

3.4

0.15

2

0.8

2.7

0.23

3

0.9

2.9

0.24

4

1.0

2.9

0.26

5

1.0

2.6

0.27

6

0.9

2.2

0.29

7

1.1

2.3

0.32