Annealing temperature (˚C)

Grain size (nm)

Resistivity (Ω-cm)

Sheet resistance (Ω/sq)

Eg (eV)

Without annealing

29.27

6.2 × 10⁻¹

31 × 10³

3.38

250˚C

30.92

8.1 × 10⁻¹

4.3 × 10³

3.47

350˚C

36.94

2.9 × 10⁻²

14.5

3.81

450˚C

48.63

9.1 × 10⁻⁴

45.6

3.76