Laser Energy E (J) ± 10% | Mean irradiance (W∙cm−2) × 1012 | Depth of Exposure µm × 10−1 | Si3N4 Window Used |
1.6 | 6.4 | 0.8 | Yes |
2 | 8.5 | 1.2 | Yes |
1.2 | 5.8 | 1.8 | Yes |
1.6 | 6.8 | 0.9 | Yes |
0.8 | 1.7 | 2.8 | Yes |