Laser spot position

Sample name

Diamond peak position (cm⁻¹)

Silicon peak position (cm⁻¹)

FWHM of diamond peak

Stress (GPa)

Quality (%)

Grain size (µm)

Grain

1-3.

1328.66

520.21

5.46

1.89

94.52

1.60

Grain

1-4.

1329.62

520.21

7.16

1.35

93.22

1.39

Grain

1-5.

1329.66

520.21

4.45

1.35

90.38

1.41

Grain

1-8.

1327.70

519.14

4.75

2.44

94.91

1.40

Grain

1-10.

1326.74

519.14

6.19

2.98

90.31

1.77