| Laser spot position | Sample name | Diamond peak position (cm−1) | Silicon peak position (cm−1) | FWHM of diamond peak | Stress (GPa) | Quality (%) | Grain size (µm) |
| Grain | 1-4 | 1330.58 | 520.21 | 4.72 | 0.80 | 91.56 | 1.28 |
| Grain | 1-8 | 1328.66 | 520.21 | 8.03 | 1.90 | 87.00 | Discontinuous |
| Grain | 1-9 | 1327.70 | 519.14 | 11.36 | 2.44 | 69.94 | Discontinuous Figure 6(k) |
| Grain | 1-10 | 1330.58 | 519.14 | 10.84 | 0.80 | 60.97 | 1.43 |