Laser spot position

Sample name

Diamond peak position (cm⁻¹)

Silicon peak position (cm⁻¹)

FWHM of diamond peak

Stress (GPa)

Quality (%)

Grain size (µm)

Grain

5-1

1327.70

521.28

12.50

2.44

76.98

2.84

Grain

4-1

1330.58

520.21

3.40

0.80

94.93

2.64

Grain

3-1

1329.62

NOT FOUND

3.52

1.35

94.15

2.60

Grain

2-2

1329.62

521.28

5.90

1.35

94.73

2.40

Grain

1-3

1331.54

520.21

3.88

0.26

93.96

2.26

Grain

1-5

1328.66

519.14

7.40

1.90

89.65

1.21