| Items | Value | ||
| Position Detection Sensor (ELCO Ni15-M30-LIU-Q12) | Gap Sensor (AEC 5520) | Acceleration Sensor (PCB 3711B 1110G) | |
| Range | 3 - 15 mm | 0 - 8 mm | ±98.1 m/s2 pk |
| Resolution | - | 1 μm | 0.012 m/s2 rms (broadband resolution) |
| Bandwidth | - | 30 kHz | - |
| Output | 0 - 10 VDC | ±5 VDC | ≤100 Ohm (impedance) |
| Input | 15 - 30 VDC | ±11 - 17 VDC | 6 - 30 VDC |