Distance mm | Substrate rpm | Current A | Carrier gas flow Lit./Min. | Power flow rate Gms./Min. | Thickness µm | Predicted values µm | % Variation |
100 | 200 | 350 | 25 | 40 | 312.54 | 289.00 | 7.53 |
90 | 175 | 375 | 35 | 45 | 178.32 | 197.79 | 10.92 |
80 | 190 | 425 | 35 | 40 | 322.89 | 358.41 | 9.91 |