Distance mm | Substrate rpm | Current A | Carrier gas flow Lit./Min. | Power flow rate Gms./Min. | Roughness µm | Predicted values µm | % Variation |
100 | 200 | 350 | 25 | 40 | 3.84 | 4.35 | 11.79 |
150 | 300 | 450 | 35 | 30 | 4.54 | 4.77 | 5.17 |
160 | 225 | 325 | 25 | 30 | 4.08 | 4.30 | 5.06 |