Distance mm

Substrate rpm

Current A

Carrier gas flow Lit./Min.

Power flow rate Gms./Min.

Roughness µm

Predicted values µm

% Variation

100

200

350

25

40

3.84

4.35

11.79

150

300

450

35

30

4.54

4.77

5.17

160

225

325

25

30

4.08

4.30

5.06