Etching time (min) | Removed thickness (μm) | Bulk etch rate (μm/h) |
80 | 3.85 ± 0.23 | 2.85 ± 0.17 |
85 | 4.22 ± 0.30 | 2.97 ± 0.21 |
90 | 4.37 ± 0.29 | 2.91 ± 0.19 |
95 | 5.16 ± 0.33 | 3.27 ± 0.21 |
100 | 5.17 ± 0.38 | 3.10 ± 0.23 |
105 | 5.88 ± 0.44 | 3.36 ± 0.25 |
110 | 6.22 ± 0.40 | 3.39 ± 0.22 |
115 | 6.80 ± 0.44 | 3.54 ± 0.23 |
120 | 6.68 ± 0.42 | 3.34 ± 0.21 |
125 | 6.78 ± 0.44 | 3.26 ± 0.21 |
130 | 7.12 ± 0.54 | 3.28 ± 0.25 |
135 | 7.39 ± 0.47 | 3.28 ± 0.21 |