Grain size

(nm)

Growth rate

(μm/h)

Reactant

gases

Growth

method

Reference

60

2.6

CH4/H2/N2/O2

MPCVD

[52]

52

0.3

CH4/H2

MPCVD

[55]

82

1.16

CH4/H2/Ar/CO2

MPCVD

[56]