Grain size (nm) | Growth rate (μm/h) | Reactant gases | Growth method | Reference |
60 | 2.6 | CH4/H2/N2/O2 | MPCVD | [52] |
52 | 0.3 | CH4/H2 | MPCVD | [55] |
82 | 1.16 | CH4/H2/Ar/CO2 | MPCVD | [56] |