n+-GaN

Multiplication [NA = 1016 (cm−3)]

Charge

9-steps Grading

Absorption

p GaN

p Al0.4Ga0.6N

p AlN

p+-AlN

p-AlxG1−xN (0.4 ≤ x ≤1)

p Al0.4Ga0.6N

N D +

W

Wm3

Wm2 (nm)

Wm1 (nm)

NA (1017 cm−3)

WC (nm)

NA

WG

NA

Wa

2 × 1018 cm−3

30 nm

250 nm

50

78

5

30

1016 cm−3

88 nm

1016 cm−3

200 nm

50

74

4.6

35

48

72

4

40

46

70

3.6

45

46

66

3.1

50