Parameter

Unit

Value

Laser beam

(continuous wave)

wavelength

laser power

focus spot diameter

processing speed

nm

W

µm

µm/s

1080

0.6 ∙∙∙ 1.8

30

50 ∙∙∙ 100

Phosphoric acid

H₃PO₄

concentration

boiling temperature

transmission coefficient

layer height

flow speed

mol/L

˚C

-

mm

m/s

5

104

0.68

20

3