Distance mm

Substrate rpm

Current A

Carrier gas flow Lit./Min.

Power flow rate Gms./Min.

Hardness µm

Predicted values

µm

% Variation

100

200

350

25

40

4.89

5.26

7.09

150

300

450

35

30

4.96

4.46

10.14

160

225

325

25

30

5.48

6.05

9.46