Technique

Atomic fraction of Ge (Standard: 0.2398)

Error (%)

Sample preparation/Note

RC

0.2463

2.71

Fast/assume relaxation (R)

RSM

0.2460

2.59

Fast/requires long sample preparation time

TEM/EDS

0.2350

2.00

Slow/consistent beam intensity and thickness of detected area

SEM/EDS

0.2433

1.46

Fast/layer larger than 1 mm; consistent beam intensity and thickness of detected area