| Type of instrument used | Δ (˚) | ψ (˚) | ne | ABBE Reading (˚) | na |
| Manual ellipsometer | 0.06 | 5.34 | 1.5296 | ||
| Automatic ellipsometer | 1.96 | 5.04 | 1.5264 | ||
| Abbe refractometer | 24.743 | 1.5283 |