Doping level

(at.% In)

Film thickness (nm)

Refractive index

As-deposited

Annealed

As-deposited

Annealed

0.0

284

272

1.82

1.86

0.6

223

204

1.76

1.90

0.8

256

231

1.79

1.86

1

239

197

1.80

1.96

1.4

268

227

1.72

1.85

2

289

273

1.67

1.75

3

249

178

1.76

1.98