Doping level (at.% In) | Film thickness (nm) | Refractive index | ||
As-deposited | Annealed | As-deposited | Annealed | |
0.0 | 284 | 272 | 1.82 | 1.86 |
0.6 | 223 | 204 | 1.76 | 1.90 |
0.8 | 256 | 231 | 1.79 | 1.86 |
1 | 239 | 197 | 1.80 | 1.96 |
1.4 | 268 | 227 | 1.72 | 1.85 |
2 | 289 | 273 | 1.67 | 1.75 |
3 | 249 | 178 | 1.76 | 1.98 |