| EC2216 | ||
4# | 5# | 6# | |
Surface figure error before bonding (λ) | 0.014 | 0.016 | 0.016 |
Surface figure error of 9 days after bonding (λ) | 0.103 | 0.074 | 0.115 |
Surface figure error after vacuum and three thermal cycles (λ) | 0.127 | 0.089 | 0.131 |